DATA PROCESSING METHOD IN X-RAY ANALYSIS MICROANALYSIS

摘要

PURPOSE:To make it possible to remove the component of a background readily, positively and accurately by specifying the range of the components of the backgrounds in the histograms of the image-luminance values of contained elements based on the range of the coordinates of the group of data which appear in the vicinity of the original point of the correlation diagram of the values of image luminances. CONSTITUTION:The measured results of both characteristic X rays of two kinds of incorporated elements are combined, and the data are processed. Namely, the measured results of the characteristics of both contained elements are converted into the luminance values of the image data, respectively, and the histograms of the image- luminance values of both contained elements are formed. Furthermore, the correlation diagram of image luminance values associated with both contained elements is plotted based on the histograms of the image-luminance values of both contained elements. Then, the range of the background components in the histograms of the image- luminance values of both contained elements is specified based on the range of the coordinates of the group of data which appear in the vicinity of the original point of the correlation diagram. In this way, the background components contained in the measured results of the characteristic X rays can be removed readily, positively and accurately.