INTERFEROMETER METHOD OF COMPARING THE RADII OF CURVATURE OF OPTICAL SPHERICAL SURFACES

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to measurement technique and can be used u0434u043bu00a0 non-contact precision measuring uniformity u043eu043fu0442u0438u0447 spherical radii of curvature u0435u0441u043au0438u0445 surfaces. the purpose of u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 - improving the accuracy and productivity of u0441u0440u0430u0432u043du0435u043du0438u00a0 radii of curvature spherical optical surfaces by simultaneously u043eu0441u0432u0435u0449u0435u043du0438u00a0 not how many mirrors and u0432u044bu0440u0430u0432u043du0438u0432u0430u043du0438u00a0 length beams.the u043du0435u043au043eu043bu043bu0438u043cu0438u0440u043eu0432u0430u043du043du044bu043c beam u0438u043du0442u0435u0440u0444u0435u0440u043eu043cu0435u0442u0440u0430 white light illuminate all u0441u0440u0430u0432u043du0438u0432u0430u0435u043cu044bu0435 surface, the number of which u043eu0433u0440u0430u043du0438u0447u0438u0432u0430u0435u0442u0441u00a0 aperture u043fu0443u0447u043a workshop as well. pre u0438u0437u043cu0435u0440u00a0u044eu0442 one means the real value of the radius of curvature of the surfaces on the alignment tolerance. if the value of admission, u0434u0430u043du043du0430u00a0 surface u043fu0440u0438u043du0438u043cu0430u0435u0442u0441u00a0 for exemplary.the u043du0435u043au043eu043bu043bu0438u043cu0438u0440u043eu0432u0430u043du043du044bu0439 beam u043du0430u043fu0440u0430u0432u043bu00a0u044eu0442 only on the model surface. the center of curvature as the surface moving in the interferometer to u043fu043eu00a0u0432u043bu0435u043du0438u00a0 on her u043fu0440u00a0u043cu044bu0445 fringe size strips. controlled surface moves u0444u0430u0437u0438u0440u0443u044eu0442 with model surface to u043fu043eu00a0u0432u043bu0435u043du0438u00a0 at all u043fu043eu0432u0435u0440u0445u043du043eu0441u0442u00a0u0445 fringe size of maximum possible con trust with the same frequency and orientation.as a result of this operation u0432u044bu0440u0430u0432u043du0438u0432u0430u044eu0442u0441u00a0 length reference and working the surfaces of each of the beams u0434u043bu00a0 / model and controlled. the surface of the u043fu0440u043eu0445u043eu0434u00a0u0449u0443u044e cross model, through the model surface. if the curvature radiuses have controlled surfaces u043eu0442u043bu0438u0447u0430u044eu0442u0441u00a0 from radius of curvature as the surface interferometer will not be aligned with the centers of their curvature.u0431u043bu0430u0433u043eu0434u0430u0440u00a0 this deviation from the measured value of the curvature radius of curvature u043eu043fu0440u0435u0434u0435u043bu00a0u044eu0442 fringe size markings on the known forms of controlled u043fu043eu0432u0435u0440u0445u043du043eu0441u0442u00a0u0445 ule. 2).