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Centrifugal spin dryer for semiconductor wafer
Centrifugal spin dryer for semiconductor wafer
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机译:半导体晶圆离心甩干机
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摘要
Apparatus for spin drying a semiconductor wafer by centrifugal force. The apparatus spins the wafer about a selected axis while the wafer is being rinsed, and then displaces the wafer away from the axis along a path of travel circumscribing the axis to dry the wafer.
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