SENDUST SOFT MAGNETIC ARTIFICIAL LATTICE THIN FILM

摘要

PURPOSE:To perform sufficient soft magnetic properties and heat resistance even if the thickness of an entire laminate is 1mum or less by alternately laminating Sendust soft magnetic materials of several tens to several hundreds of Angstrom and other materials of several tens to several hundreds of Angstrom thinner than the magnetic material on a base. CONSTITUTION:A thin magnetic film 2 having 1mum or less of thickness is formed on a nonmagnetic or magnetic base 1. The film 2 is formed by alternately laminating thin films 3,.., made of Sendust (Fe-Al-Si) soft magnetic material of, for example, several tens to several hundreds of Angstrom (several nm to several tens nm) thick, and thin films 4,.., made of other magnetic material or oxide of several to several tens of Angstrom thick by sputtering, CVD, etc.