PURPOSE:To enable fast, high-sensitivity inspection by providing a light emitting element, a light receiving element, a reflection type light receiving and emitting element, an angle adjusting means, and a rotating means. CONSTITUTION:When the reflection factor distribution of a surface to be inspected is inspected, the light receiving and emitting element 1 is set perpendic ularly to the surface to be inspected. The light from the light emitting element 1b is converged by a condenser lens and irradiate the object surface so as to have its focus F on it, and the light reflected by the object surface is con verged by a light receiving lens 1e and guided to the light receiving element 1c. When a dirt, a flaw, etc., present on the object surface are inspected, the angle adjusting means 2 and rotating means 3 are used to slant the light receiv ing and emitting element 1 to the object surface. The light from the light emit ting element 1b is converged by the condenser lens and irradiates the object surface so as to have its focus F on it, and the light scattered by the dirt, flaw, etc., on the object surface is converged by the light receiving lens 1e and then guide to the light receiving element 1c.
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