METHOD FOR GENERATING EXTREMELY ULTRAHIGH-VACUUM ENVIRONMENT

摘要

PURPOSE:To attain a ultrahigh vacuum by irradiating the periphery of a partial space in a vacuum chamber provided with an evacuating means with a laser beam and evacuating the chamber while a part of the space enclosed by the laser beam is surrounded by a magnetic field region. CONSTITUTION:The periphery of a partial space in a vacuum chamber 9 provided with evacuating means 11-13 is irradiated with a laser beam 1. The chamber is evacuated by the means 11-13 while a part of the space enclosed by the laser beam is surrounded by a magnetic field region 2. Consequently, a ultrahigh vacuum is attained without being affected by the gas generated from the inner wall of the chamber and the material of the pump.