PURPOSE: To make it possible to check up afterward whether or not an analysis of a desired analytical point is conducted, by picking up and recording an image of an area containing the position of the analysis by an analyzing probe, and by observing the image. ;CONSTITUTION: An electron beam microprobe 2 from an electron beam probe generating part 1 is led to the surface of a sample 4 on a sample stage 3. From an analytical point 5 to which the probe 2 is applied, a characteristic X ray 6 corresponding to a component element of the sample 4 is emitted by the application of electrons. This X ray 6 is detected in a signal detecting system 7 and used for the analysis of the component element of the sample 4 and the concentration thereof at the analytical point 5. The sample stage is driven longitudinally, laterally and vertically by a driving device 8. An image magnified by an optical microscope 10 is picked up by a CCD camera 11 and recorded on a magnetic tape in a video tape recorder 12. Even when the analysis of a plurality of analytical points is conducted automatically, the analytical points are checked up by reproducing afterward the image recorded by the recorder 12.;COPYRIGHT: (C)1993,JPO&Japio
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