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Method for microwave plasma assisted CVD diamond coating.
Method for microwave plasma assisted CVD diamond coating.
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机译:微波等离子体辅助CVD金刚石涂层的方法。
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摘要
The invention relates to a method for diamond coating of a large number of discrete components by Microwave Plasma Assisted CVD equipped with a bowl shaped substrate table. Its geometrical shape and configuration results in a more stable plasma, the shape and position of which conform well with the individual components. This reactor geometry also enhances the flow of the excited gas mixtures and therefore a large number of discrete components can be coated simultaneously even at high microwave power. IMAGE
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