A method for evacuating a vacuum chamber and a high-vacuum chamber as well as high vacuum plant for carrying out the

摘要

the evacuating a vacuum chamber (4) and a hochvakuumkammer (5) are two pumpstru00e4nge (6, 7) are provided, each of which vakuumpumpeinheit (8, 9) and a prevacuum pumpeinheit (10, 11).the prevacuum pumpeinheit (11) of the pumpstranges (7) of the hochvakuumkammer (5) can be the vacuum pumpeinheit (9) of the hochvakuumkammer (5) or also to the hochvakuumkammer (5) connected to a high pumpeinheit (12) connected upstream.the vacuum pumpeinheit (9) can be either from the hochvakuumkammer (5) or the vacuum chamber (4) anzusaugen and the prevacuum pumpeinheit (10) of the pumpstranges (6) or to the prevacuum pumpeinheit (11) of the pumpstranges (7) to promote.