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Virtually distortion-free imaging system for large field, high resolution lithography
Virtually distortion-free imaging system for large field, high resolution lithography
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机译:用于大视场,高分辨率光刻的几乎无失真的成像系统
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摘要
Virtually distortion free large field high resolution imaging is performed using an imaging system which contains large field distortion or field curvature. A reticle is imaged in one direction through the optical system to form an encoded mask. The encoded mask is then imaged back through the imaging system onto a wafer positioned at the reticle position.
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