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CANTILEVER FOR ATOMIC FORCE MICROSCOPE, MANUFACTURE THEREOF, ATOMIC FORCE MICROSCOPE AND SAMPLE SURFACE ADHESION EVACUATION USING THIS CANTILEVER
CANTILEVER FOR ATOMIC FORCE MICROSCOPE, MANUFACTURE THEREOF, ATOMIC FORCE MICROSCOPE AND SAMPLE SURFACE ADHESION EVACUATION USING THIS CANTILEVER
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机译:原子力显微镜用悬臂,其制造,原子力显微镜和使用该悬臂的样品表面附着力评估
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摘要
PURPOSE:To quantitatively evaluate the adhesion between two material surfaces. CONSTITUTION:The surface of the probe 12 of the cantilever of an interatomic force microscope is formed with a desired film, e.g. a resist film 11b, the interatomic force acting between the probe 12 and a sample is measured, and the adhesion between the film 11b formed on the surface of the probe 12 and the sample surface is evaluated based on the interatomic force.
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