METHOD FOR MEASURING SCATTERING LIGHT AND DISTRIBUTION OF SCATTERING ANGLE

摘要

PURPOSE: To provide a method for measuring the scattering light of an optical element and the distribution of the scattering angle easily by means of a same equipment while enhancing the detecting capacity in the vicinity of the axis of reflected light. ;CONSTITUTION: In a method for measuring the scattering light from an optical element using an integrating sphere, scattering light in the vicinity of the axis of reflected light leaked through a hole made in the integrating sphere in order to release the reflecting light is reflected on a concave mirror for reflecting the scattering light disposed around the extension of the axis of reflecting light at a position remote from the integrating sphere and returned back to the integrating sphere side thus enhancing the detecting capacity of scattering light in the vicinity of the axis of the reflecting light. Furthermore, the integrating sphere or a measuring sample is moved in parallel along the axis of incident light in an equipment for detecting the scattering light from an optical element using an integrating sphere, and the scattering light is measured at each position while limiting the scattering angle of the scattering light being taken into the integrating sphere thus obtaining the scattering angle distribution of scattering light.;COPYRIGHT: (C)1994,JPO&Japio