MANUFACTURE OF AMORPHOUS MAGNETIC THIN FILM WITH UNIAXIAL MAGNETIC ANISOTROPY

摘要

PURPOSE: To provide a manufacturing method of an amorphous magnetic thin film with good uniaxial magnetic anisotropy all over a wide area. ;CONSTITUTION: In the manufacturing method of an amorphous magnetic thin film having uniaxial magnetic anisotropy, when an amorphous magnetic thin film is formed on a substrate by sputtering a target in gas atmosphere, an organic high polymer film wherein an absolute value of a difference αMD-αTD between heating contraction ratio αMD in a longitudinal direction and heating contraction ratio αTD in a width direction after heating treatment at 150°C for 15 minutes is 0.003 to 0.015 is used as a substrate.;COPYRIGHT: (C)1995,JPO