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DRAWING METHOD OF CROSS-SECTIONAL STRUCTURE AND DRAWING PROCESSING DEVICE OF CROSS-SECTIONAL STRUCTURE
DRAWING METHOD OF CROSS-SECTIONAL STRUCTURE AND DRAWING PROCESSING DEVICE OF CROSS-SECTIONAL STRUCTURE
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机译:截面结构的绘制方法及截面结构的加工装置
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摘要
PURPOSE: To reduce the number of image-dividing cells and to reduce drawing time by grouping a plurality of small cells with the same material attribute which are aligned continuously in horizontal or vertical direction into blocks and drawing on a block basis. ;CONSTITUTION: An image consisting of a number of small cells expressing the sectional structure of an integrated circuit is generated from the design data of an integrated circuit and a color for each material attribute is assigned to each cell for drawing on a screen. In such a drawing method, a plurality of small cells with the material attribute being aligned continuously in horizontal or vertical direction are grouped into blocks and are drawn on that block basis. For example, a plurality of small cells with the same material attribute being aligned continuously in horizontal direction or vertical direction in a cell matrix with 5×5 cell are grouped into eight blocks, namely 'AFKPU', 'B', 'CDE', 'GHLM', 'IFNO', 'QV', 'RST', and 'WXY'. Then, drawing is made with a drawing color assigned to each material attribute on the block basis.;COPYRIGHT: (C)1995,JPO
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