USES OF MICROSPHERES AND MICROSPHEROIDS MADE OF DIAMOND, CBN OR STRUCTURED CERAMIC MATERIALS IN MICROMECHANICS, SENSOR AND MEDICAL TECHNOLOGY, TRIBOLOGY AND RELATED FIELDS

摘要

Spherical or spheroid grains made of diamond, cubic boron nitride (CBN) or structured ceramic materials are used to produce structural elements and components in micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields, for example to produce ball bearings, low abrasion and low attrition sliding surfaces, ball or globe valves, submillimetric pumps and micropumps, micropumps for feeding the smallest amounts of gasses, powders or liquids and for producing micropistons, as well as highly accurate microsyringes for injecting volumes from 1 νl down to 1 al(1.10-181).