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Phase detection deflectometer-type optical device having a large measuring range

机译:测量范围大的相位检测偏转仪式光学装置

摘要

An optical device, of the deflectometer type, particularly with phase detection, comprises a light source, a surface to be tested, a semi- reflective surface between the light source and the surface to be tested to deflect the light beam reflected by the surface to be tested, a grating placed adjacent a focal region of the reflected light beam, and a CCD camera coupled to a data processor. Between the grating and the CCD camera there is a primary objective (19) with a large entry pupil supplying an intermediate image, a ground glass (20) adapted to receive this intermediate image, and a secondary optical system (21) through which the intermediate image passes which is formed on the ground glass (20) and which forms a final image on the a detector (6) of the CCD camera.
机译:偏转计类型的光学装置,特别是具有相位检测的光学装置,包括光源,要测试的表面,在光源和要测试的表面之间的半反射表面,以将由该表面反射的光束偏转到测试时,将一个光栅放置在反射光束的焦点区域附近,并将CCD摄像机耦合到数据处理器。在光栅和CCD相机之间有一个主要物镜(19),该物镜带有一个提供中间图像的大入射光瞳,一个用于接收该中间图像的毛玻璃(20)和一个通过该中间物镜的辅助光学系统(21)。图像通过,该图像形成在毛玻璃(20)上,并在CCD摄像机的检测器(6)上形成最终图像。

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