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Phase detection deflectometer-type optical device having a large measuring range
Phase detection deflectometer-type optical device having a large measuring range
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机译:测量范围大的相位检测偏转仪式光学装置
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摘要
An optical device, of the deflectometer type, particularly with phase detection, comprises a light source, a surface to be tested, a semi- reflective surface between the light source and the surface to be tested to deflect the light beam reflected by the surface to be tested, a grating placed adjacent a focal region of the reflected light beam, and a CCD camera coupled to a data processor. Between the grating and the CCD camera there is a primary objective (19) with a large entry pupil supplying an intermediate image, a ground glass (20) adapted to receive this intermediate image, and a secondary optical system (21) through which the intermediate image passes which is formed on the ground glass (20) and which forms a final image on the a detector (6) of the CCD camera.
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