首页>
外国专利>
Non-centric improved pumping stage for turbomolecular pumps
Non-centric improved pumping stage for turbomolecular pumps
展开▼
机译:涡轮分子泵的非中心式改进泵级
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention refers to a pumping stage particularly designed for turbomolecular pumps, having increased compression ratio, and capable of extending the operating range of the turbomolecular pump towards high pressure. The new pumping stage comprises a casing housing, a rotor disk, and a substantially coplanar stator ring. The stator ring consists of two plates connected with each other along their circumferential periphery, thereby defining a region of close tolerance with the opposite surfaces of the rotor. The rotor and stator cooperate to define a tapered, free annular channel having a suction port and a discharge port at the opposite ends of this channel. The channel tapers in a functional, predetermined fashion, having the largest cross- sectional area near the suction port, and converging, according to the rotational direction of the rotor, at the discharge port.
展开▼