METHOD FOR GENERATING COHERENT CHARGED PARTICLE BEAM, AND DEVICE THEREFOR

摘要

PURPOSE: To easily generate a coherent charged particle beam without losing a particle by introducing the time coherence corresponding to the space coherence of Bose-Einstein condensation, and further using a specified means together to cause coherence in an accelerated charged particle which is the general term of accelerated electron and ion. ;CONSTITUTION: Pulsation is also used together in addition of the uniforming of energy of a particle beam, and coherence is caused in an accelerated charged particle which is the general term of accelerated electron and ion. Namely, in a charged particle beam device such as a particle beam microscope, an accelerator, or a particle beam accumulation ring, a high frequency electric field having a frequency and strength matching to the magnetic field in TE mode (by high frequency resonators 14, 15) for the magnetic axis is worked within solenoid magnetic field generating parts 12, 13 provided along the charged particle beam, and cyclotron maser cooling and turning phase punching for uniforming the cyclotron turning energy of the charged particle are simultaneously caused to generate a coherent charged particle beam 17 having time coherence.;COPYRIGHT: (C)1996,JPO