HIGH FREQUENCY ELECTROMAGNETIC FIELD COUPLING TYPE THIN FILM LAMINATED ELECTRODE, HIGH FREQUENCY TRANSMISSION LINE, HIGH FREQUENCY RESONATOR, HIGH FREQUENCY FILTER, HIGH FREQUENCY DEVICE, AND METHOD FOR SETTING UP FILM THICKNESS OF THE ELECTRODE

摘要

PURPOSE: To reduce the loss of a conductor by simple structure by forming an electromagnetic field coupling type thin film laminated transmission line using a high frequency electromagnetic field coupling type thin film laminated electrode on which thin film conductors and thin film dielectrics are alternately laminated. ;CONSTITUTION: A band-like thin film conductor 5 having longitudinal length of g/2 (g is intra-conduit wavelength) is formed on a dielectric substrate 10. A main transmission line LN 10 is constituted of conductors 5, 11 and the substrate 10 held between the conductors 5, 11. Then a thin film dielectric 30-4, a thin film conductor 4, a thin film dielectric 30-3, a thin film conductor 3, a thin film dielectric 30-2, a thin trim conductor 2, a thin film dielectric 30-1, and a thin film conductor 1 are successively laminated on the conductor 5. Then an input terminal conductor 12 and an output terminal conductor 13 are formed on the substrate 10 with respective gaps g1, g2 from the conductor 5 so as to be electromagnetically mutually coupled.;COPYRIGHT: (C)1996,JPO