首页> 外国专利> And a method for producing the material has a Bi ▲ under 2 ▼ WO ▲ under 6 ▼ based crystal film in which C-axis orientation

And a method for producing the material has a Bi ▲ under 2 ▼ WO ▲ under 6 ▼ based crystal film in which C-axis orientation

机译:并且该材料的制造方法具有Bi▲在2▼WO WO▲在6▼以下的基于C轴取向的结晶膜

摘要

PURPOSE:To form a C-axis oriented Bi2WO6 crystal film in a low temp. range by repeating the operations of first evaporating Bi onto the surface of a base material on which a vapor deposited layer of SO3 is formed, then evaporating WO3 thereof to form the vapor deposited layer. CONSTITUTION:The vapor deposited WO3 layer is formed on the surface of the substrate consisting of an MgO single crystal, etc., in a vacuum vessel where a slight quantity of oxygen exists to form the base material having the (001) face of the WO3 single crystal on the surface. The substrate is heated to evaporate the Bi first so that the vapor deposited Bi2O2 layer corresponding to the thickness of the Bi2O2 in the C-axis direction of the unit lattice of the Bi2O6 crystal is formed thereon. The WO3 is then evaporated to form the vapor deposited layer corresponding to the thickness of the WO4 in the C-axis direction of the unit lattice of the Bi2WO6 crystal. The evaporation of the Bi and WO3 is repeated. The evaporation of the WO3 is otherwise substd. partly with the evaporation of MoO3. The material having the C-axis oriented Bi2WO6 crystal film which is preferably as a dielectric or piezo-electric material is thereby obtd.
机译:目的:在低温下形成C轴取向的Bi2WO6晶体膜。通过重复以下操作的范围,首先将Bi蒸发到其上形成有SO 3气相沉积层的基材表面上,然后蒸发其WO 3以形成气相沉积层。组成:气相沉积的WO3层是在真空容器中的由MgO单晶等组成的基板表面上形成的,该容器中存在少量的氧气以形成具有WO3(001)面的基材表面上的单晶。首先加热衬底以蒸发Bi,从而在其上形成与Bi2O6晶体的单位晶格的C轴方向上的Bi2O2的厚度相对应的气相沉积的Bi2O2层。然后将WO 3蒸发以形成与Bi 2 WO 6晶体的单位晶格的C轴方向上的WO 4的厚度相对应的气相沉积层。重复Bi和WO 3的蒸发。否则,将消除WO 3的蒸发。部分是由于MoO3的蒸发。由此,获得具有C轴取向的Bi 2 WO 6晶体膜的材料,该材料优选作为电介质或压电材料。

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