Semiconductor professional - bu inspection de - ta totaling device

摘要

PURPOSE:To automatically totalize the inspection results by using a terminal equipment which detects the signal received from a prober and can transfer data, a repeater which integrates those data, and a totalizer which integrates plural repeaters. CONSTITUTION:The inspection of a product is started with start of a prober totalizer 11. When this inspection is over the handling count value is increased by 1. Then a nondefective counter counts up by 1 when a nondefective product is detected. The wafer end signal received from the part 11 is detected by a terminal equipment 12 and the number of nondefective slices is sent to a repeater 13. When the measurement is through with all slices charged by the probers, all information supplied to the repeater 13 are transferred to a totalizer 14 from the repeater 13 at every prober unit.