CONTROL OF SUPPRESSION OF FLUCTUATION IN ROTATING SPEED OF BODY TO BE ROTATED OF CONTACLESS ROTATIONAL DRIVING TRANSMISSION SYSTEM

摘要

PURPOSE: To efficiently control rotation of a contactless rotational driving transmission system by applying the power to control suppression of negative amplitude of the sinusoidal curve of the same period as the periodic fluctuation of the rotating speed of a body to be rotated and smaller than the amplitude of the periodic fluctuation on a driving motor. ;CONSTITUTION: A pallet 15 arranged in a film forming chamber 1B of a sputtering device is rotated by a magnetic coupling 23 consisting of a driven side plate 27 mounted thereon and a prime moving side plate 25 of a contactless rotational transmission system 31. The rotation of this pallet 15 is detected by a laser beam emitting device 37a and a detector 39a, etc. The rotating speed and its fluctuation are calculated by a controller 43. This rotating speed is kept constant by controlling the driving motor 35 via a servo driver 47 in accordance with a speed command. The power to control the suppression of the negative amplitude of the sinusoidal curve of the same period as the periodic fluctuation and smaller than the amplitude of the periodic fluctuation, preferably 50 to 80%, is applied on the driving motor 35 in the event of the fluctuation in this rotating speed. As a result, the rotating speed of the pallet 15 is controlled constant in a short period of time.;COPYRIGHT: (C)1996,JPO