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Method and apparatus for minimizing degradation of equipment in a laser cleaning technique
Method and apparatus for minimizing degradation of equipment in a laser cleaning technique
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机译:使激光清洁技术中的设备性能降到最低的方法和设备
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摘要
A method and apparatus for cleaning equipment surfaces using a laser. A barrier layer is provided at a surface to be cleaned prior to being impinged by light from a laser in order to avoid degradation in the form of oxidation of the surface. The laser light causes residual material on the surface to be removed while the barrier layer ensures that energy from the laser light is evenly distributed. In addition, the barrier layer shields the surface from oxygen to thereby prevent oxidation of the surface.
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