APPARATUS FOR MONOCRYSTAL OXIDE FILMS PRODUCTION USING LIQUID PHASE EPITAXY

摘要

FIELD: production of monocrystal oxide films using liquid phase epitaxy. SUBSTANCE: apparatus for production of monocrystal oxide films using liquid phase epitaxy has isolating central pipe and also crucible made of electroconductive material and coaxially located in cylindrical member of structure. EFFECT: increased productivity.