Apparatus for and method of detecting/identifying microbial contamination in ultra-pure water systems

摘要

An apparatus for and a method of on-line detecting and assessing, in situ,he amount and characterization of microbial trace contamination in an associated ultra-pure water system is disclosed. The apparatus comprises, inter alia, a monitor/detector portion and an assessment/identification portion. The monitor/detector portion includes a contamination mass detector which nondestructively senses the presence of microbial biofilms in real time when grown upon the surface of a quartz crystal wafer portion of the contamination mass detector. The assessment/identification portion is configured to provide quantitative analysis of the microbial biofilms formations based on signature biomarker cellular components. A programmable controller is configured to integrate these and other portions into an automated apparatus, which is capable of providing real time chemical countermeasures to prevent the potential deleterious effect of the microbial trace contamination uncovered.