METHOD FOR MANUFACTURING A STRUCTURE WITH A USEFUL LAYER REMOTELY REMOVE A SUBSTRATE BY STOPS, AND DEOLIDARIZING SUCH A LAYER

摘要

P A method of manufacturing a structure with a useful layer (120) kept at a distance from a substrate (100) by abutments (150, 151) and for separating such a layer. BR/ This method comprises the following steps: BR/ - first partial et selective etching of the sacrificial layer while leaving between the substrate and the useful layer at least one spacer block (140), BR/ - second selective etching of the useful layer (120) and / or the substrate (100) using the spacer (140) as a mask to form at least one stop (150, 151) in said useful layer and / or the substrate, BR/ - elimination said spacer. / P