FILTRATION EFFICIENCY MEASURING DEVICE FOR DUST-PROOF FIBER MEMBER AND METHOD FOR MEASURING FILTRATION EFFICIENCY

摘要

PROBLEM TO BE SOLVED: To provide a filtration efficiency measuring device, for a dust-proof base satin, which is capable of setting the time limit of use of the dust-proof base satin by accurately measuring the filtration efficiency of the dust-proof base satin on humidity conditions such as a static electricity-free clean room for preventing the clean room from becoming contaminated by a particle generated from the body of an operator. ;SOLUTION: This filtration efficiency measuring device is equipped with a sample fixing jig 3 for fixing a sample 1 to be used for the measurement of filtration efficiency, a chamber 11 for forming a closed space in which the sample fixing jig 3 is fitted, a gas ionization part 13 for generating a specified ionized gas and injecting it into the chamber 11 in order to remove static electricity in the chamber 11, a particle generating part 15 for generating a particle and injecting it into the chamber 11, and a particle counting part for counting the number of particles before and after the permeation of the particle through the sample 1.;COPYRIGHT: (C)1998,JPO