TREATMENT DEVICE EQUIPPED WITH TREATMENT VESSEL HAVING DIRECT-ACTING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a treatment device equipped with a treatment vessel in which it is difficult that receives effect of thermal strain caused by heating a treatment object and fine refuse is inhibited from being generated therein. ;SOLUTION: Both ends of two pieces of supporting shafts 2a, 2b for driving perforate the wall of a treatment vessel 1 and reach the outside. Linear motors 4a, 4b are provided on both sides thereof to translationally move the supporting shafts 2a, 2b in the vessel. A holding stand 6 of a base plate is supported by the supporting shafts 2a, 2b for driving in the vessel. Vacuum bellows 5a, 5b are provided so as to hold airtightness in the inside of the vessel 1 in the part in which the supporting shafts 2a, 2b for driving perforate the wall of the vessel 1. The holding stand 6 is supported by supporting members provided in two pieces of supporting shafts 2a, 2b for driving in one end part in the moving direction and in the other end part on the opposite side. Moreover, the supporting member in one end part is supported so that the holding stand 6 is freely moved on the supporting face thereof. The supporting member in the other end part is fitted to the holding stand 6 through a bearing.;COPYRIGHT: (C)1998,JPO