SCHOTTKY BARRIER TYPE SOLID-STATE IMAGE PICKUP ELEMENT AND IMAGE PICKUP DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To detect both an infrared-ray image and a visible light image with high sensitivity by constituting a photodetection part consisting of Schottky diodes arrayed in two dimensions so that its substrate has a thickness of approximately a pixel pitch and less, providing a metal reflector-cum-rear electrode on the rear surface of a photodetection area, and forming a metal light shield film at least on an electron scanning function element. ;SOLUTION: Infrared rays are made incident on a Schottky electrode 2 through an insulating film 10 and photoelectrically converted. The Schottky electrode 2 is extremely thin, so part of the incident infrared rays are transmitted, but made incident again by the metal reflector-cum-rear surface electrode 11a. Visible light is transmitted through the insulating film 10 and made incident on the Schottky electrode 2 and part of it is absorbed, but the majority is absorbed in p type Si1 to form an electron-hole couple, so that electrons are gathered as signal charges to the Schottky electrode 2 by the biases of the Schottky electrode 2 and rear surface electrode 11a. A metal light shield film 9 is formed in front of a vertical CCD electrode 8 so that unnecessary photoelectric conversion is caused.;COPYRIGHT: (C)1998,JPO