MARKER AND MARKER DETECTING METHOD TO BE USED FOR WORKING EQUIPMENT, RECORDING AND REPRODUCING EQUIPMENT, ETC., APPLYING SPM EQUIPMENT OR PRINCIPLE OF SPM

摘要

PROBLEM TO BE SOLVED: To facilitate the formation of a marker and enable high speed position detection, by constituting a marker composed of at least two segments wherein at least a couple of segments which are not parallel is contained in couples of segments and does not intersect each other. ;SOLUTION: The marker 111 composed of segments 101-103 which are arranged, e.g. at 45° intervals. Prolongation lines of the segments cross at a point. The marker 111 is recorded by applying a recording bias voltage to a probe, and scanning a record layer along the segments 101-103, with the probe. When the coordinate system viewed from the control system is Σ (161), and the coordinate fixed to the marker 111 is Σ' (162), the origin of the coordinate system Σ' (162) coincides with the intersection of the prolongation lines of the segments 101-103. One of the coordinate axes of Σ' (162) coincides with the segment 102. In order to detect the marker 111, the probe is made to move at the scanning start point 151 of the marker 111 by driving an xyz driving mechanism, and the marker 111 is linearly scanned. Hence a current flowing in the record layer is measured.;COPYRIGHT: (C)1997,JPO