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Creation manner null of dual

机译:双重创作方式无效

摘要

PURPOSE:To reproduce grating on substrate side by a method wherein the grating is produced at positions, which lie on one straight line intersecting the center of the circle of a stamper and are symmetrical with each other, in such a manner that the direction of the groove is parallel or normal to said straight line so as to be coated with ultraviolet-curing resin in order to be exposed to ultraviolet rays under the state that substrate is brought into close contact with the surface of said resin. CONSTITUTION:Grating 19 for front surface is produced at positions, which lie on one straight line 18 intersecting the center A of a stamper 17 installed on a rotary state and are symmetrical with each other, in such a manner that the direction of the groove of the grating is parallel or normal to the straight line 18. Laser beams emitted from a laser beam source 23 is irradiated over the grating 19 for front surface on the stamper 17. Only the stamper 17 is turned for fine adjustment so that reflected beams and diffracted and reflected beams reach to the straight line 30 described on a locus surface 29. Ultraviolet-curing resin 31 is applied on the grating 19 for front surface and, after that, a cover 21 is mounted over the stamper. Since a recess 22 is formed in the cover 21 at the part facing to the grating 19 for front surface, substrate 28 is positioned in the recess 22 so as to be brought into close contact with the ultraviolet-curing resin 31. By exposing the resin to ultraviolet beams under the state just mentioned above, the grating for front surface is reproduced in the substrate 28 side.
机译:用途:通过一种方法在基板上复制光栅,其中光栅是在与压模圆心相交的一条直线上且彼此对称的位置上生成的,凹槽平行于或垂直于所述直线,以便在使基板与所述树脂的表面紧密接触的状态下用紫外线固化树脂涂覆以便暴露于紫外线。组成:用于前表面的光栅19的位置位于一条直线18上,该直线与以旋转状态安装的压模17的中心A相交,并且彼此对称,以使凹槽的方向光栅平行于或垂直于直线18。从激光束源23发射的激光束被照射在压模17上用于正面的光栅19上方。仅压模17进行微调,以使反射光束和衍射光束发生衍射。紫外线固化树脂31施加在前表面的光栅19上,然后在压模上安装盖21。由于在盖体21中的与前表面光栅19相对的部分上形成有凹部22,因此基板28位于凹部22中,以与紫外线固化树脂31紧密接触。在上述状态下,在紫外线的作用下,在基板28侧再现表面用光栅。

著录项

  • 公开/公告号JP2790648B2

    专利类型

  • 公开/公告日1998-08-27

    原文格式PDF

  • 申请/专利权人 RIKOO KK;

    申请/专利号JP19890094167

  • 发明设计人 SUMI TAKESHI;

    申请日1989-04-13

  • 分类号G11B7/135;B29D17/00;G02B5/18;G11B7/26;

  • 国家 JP

  • 入库时间 2022-08-22 03:01:44

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