In the reducing atmosphere reactor the atmosphere gas measuring method

摘要

PURPOSE:To permit the measurement of the characteristics of atmosphere in a furnace stably with sufficient reliability by a method wherein the atmosphere in the furnace is evaluated from an output value, outputted from an oxygen partial pressure meter, based on a relation between the actually measured output value and the logical output value of the oxygen partial pressure meter upon supplying calibration gas. CONSTITUTION:At least one kind of gas, having a composition corresponding substantially to the composition of atmosphere in a furnace, which contains at least CO, CO2, H2 and N2, and containing gas of known characteristics, which generates a predetermined output between a reference comparing gas by contacting it with a measuring electrode 4, is supplied into a gas receiving space 14 through a gas supplying hole 17 as calibration gas while a relation between an actually measured output value, obtained by measuring the output value of an oxygen partial pressure meter 2 upon supplying the calibration gas, and the logic output value of the oxygen partial pressure meter upon supplying the calibration gas is obtained. Atmosphere in a furnace is evaluated from the output value of the oxygen partial pressure meter, which is outputted in accordance with the atmosphere in the furnace, based on the relation thus obtained.