Manufacturing method of capacitive sensor system and cylindrical sensor for measuring shaft rotation accuracy of machine tool

摘要

The present invention relates to a capacitive sensor system for measuring the shaft rotational accuracy of a machine tool, and more particularly, to a capacitive sensor developed for a purpose, and a super-precision rotating precision measurement system through signal processing thereof.;The present invention is to provide a system for measuring only the motion component of the axis to remove the shape error of the measurement object for the measurement of the rotation accuracy of the precision spindle, which is difficult to measure by a general displacement measuring sensor as described above.