Magazine Shanghai Song Device

摘要

The subject innovation is the magazine is coupled to a lower portion, and a screw which drives the magazine in the vertical direction, the screw is a power transmission means, and the vertical drive of the screw to pass the driving source, the driving force of the driving source for generating a driving force so that the vertical drive to the bus Kurume reduce the vibration which is transmitted to the magazine in accordance with and, hayeoseo comprising a magazine holding means for guiding the magazine and movement of, the present invention relates to a magazine Shanghai transfer unit for transferring a plurality of wafer frames are loaded magazine up or down by one step.