Arrangement and method for monitoring the pressure difference between the two subspaces, the gas-tight separation forms an optical component

摘要

The system determines defects such as cracks or holes in the optical component occurring during its use e.g. crack which extends from one surface to another of the component. The optical component (2,6) forms a gas-tight partition between two part chambers (8,13), so that in one part chamber (8) a pressure exists, which is different compared to the pressure ruling in the other part chamber (13). At least one pressure meter (10) is provided, which detects the pressure in one of the two part chambers. The pressure sensor is connected to an evaluation unit which, with pressure alteration in the part chamber monitored using the pressure sensor (10), produces a warning signal. The pressure sensor determines that part chamber in which a lower pressure exists.