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Interferometer with compound optics for measuring cylindrical objects at oblique incidence
Interferometer with compound optics for measuring cylindrical objects at oblique incidence
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机译:带有复合光学元件的干涉仪,用于测量倾斜入射的圆柱形物体
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摘要
Compound diffractive optics are used in an interferometer for simultaneously measuring multiple surfaces, making multiple measurements of individual surfaces, conveying test beams multiple times, and aligning pairs of the diffractive optics with each other. Typically, the compound optics have multiple diffraction zones that reshape test beams for reflecting from test surfaces or for combining with reference beams. The multiple diffraction zones can also exhibit different optical qualities such as transmission and reflection for conveying the test beams to and from the test surfaces.
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