PROBLEM TO BE SOLVED: To enable observation of a floating conduction region without charge-up phenomenon, by electrically connecting a conducting layer region in an electrically floating state with a conducting layer region which is not in a floating state, and performing scanning irradiation with a charged particle beam in a region narrower than a recessed part for section observation. ;SOLUTION: Scanning irradiation of a convergent ion beam is repeatedly performed in a specified region 60 of a specimen, thereby forming a recessed part 61 for forming a side wall on which a second conducting layer 51 and a first conducting layer 50 are exposed. A region 63 except the specified region 60 is irradiated with a convergent ion beam from above the electrically floating second conducting layer 51, thereby forming a hole 62 reaching the first conducting layer 50, and electrically connecting the first conducting layer 50 with the second conducting layer 51. A desired exposed portion in the recessed part 61 is observed by using a charged particle beam. As a result, charges which cause charge-up between the two electrically independent conducting layers 50 and 51 can be discharged, and observation without charge-up phenomenon is enabled.;COPYRIGHT: (C)1999,JPO
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