LAYER-LIKE HIGH TEMPERATURE SUPERCONDUCTOR SPECIFIC JOSEPHSON EFFECT DEVICE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To precisely control the length of a supercurrent path by an acceleration voltage, and improve mechanical strength since a current path is buried. ;SOLUTION: The device is provided with a fine supercurrent path 15 formed inside a superconductor single crystal, an insulated layer 14 formed by ion implantation to bury the supercurrent path 15, and an epitaxial high temperature superconductive electrode layer 16 formed on the supercurrent path 15 and the insulated layer 14. The manufacturing method has a process for forming a layer-like high temperature superconductor, a process for forming an island- like mask for forming a specific Josephson junction in an upper surface of the layer-like high temperature superconductor, a process for forming an insulated layer by ion implantation, and a process for removing the island-like mask and forming an epitaxial high temperature superconductive electrode layer.;COPYRIGHT: (C)1999,JPO