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Coat manner null of vapor phase modulo

机译:气相模量的涂层方式无效

摘要

PURPOSE:To obtain a diamond film having high homogeneity and adhesion by a moving flame method over a large area at a high speed by heating a surface on which diamond is deposited with a small-sized burner precedent to a main burner. CONSTITUTION:A main burner 1 and a small-sized burner 2 are arranged with the nozzles downward at 10mm interval, acetylene and oxygen are sent to the burner 1 in about 0.92 ratio of oxygen to acetylene and a flame is formed by combustion. At the same time, acetylene and oxygen are sent to the burner 2 in 0.98 ratio of oxygen to acetylene and a flame is formed. These burners are set in a reaction vessel, the internal pressure of the vessel is regulated to 500Torr and a WC-Co substrate is kept at 900 deg.C. The burners are moved parallel to the substrate at 7mm interval from one end in the longitudinal direction at 0.35mm/min rate and the substrate is coated with diamond.
机译:目的:通过移动火焰法在大面积上以大面积燃烧器先于主燃烧器加热沉积金刚石的表面,从而在大面积上高速获得具有高均匀性和粘附性的金刚石膜。组成:主燃烧器1和小型燃烧器2的喷嘴向下间隔10毫米,乙炔和氧气以氧气与乙炔的约0.92的比例输送到燃烧器1并通过燃烧形成火焰。同时,乙炔和氧气以氧气与乙炔的比率为0.98送入燃烧器2并形成火焰。将这些燃烧器设置在反应容器中,将容器的内部压力调节至500Torr,并且将WC-Co基底保持在900℃。使燃烧器以0.35mm / min的速率从纵向的一端以7mm的间隔平行于基底移动,并且基底上涂覆有金刚石。

著录项

  • 公开/公告号JP2833839B2

    专利类型

  • 公开/公告日1998-12-09

    原文格式PDF

  • 申请/专利权人 SHOWA DENKO KK;

    申请/专利号JP19900200233

  • 发明设计人 KOMAKI KUNIO;

    申请日1990-07-27

  • 分类号C30B29/04;

  • 国家 JP

  • 入库时间 2022-08-22 02:28:30

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