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Synthesis method null of vapor phase modulo

机译:汽相模合成方法无效

摘要

PURPOSE:To obtain stabilized wide-range combustion flame plasma and to deposit a diamond film high in flatness and adhesive strength at a high rate at the time of burning a diamond depositing compd. by providing a reflector at the tip of a combustion burner. CONSTITUTION:When a diamond depositing compd. such as gaseous acetylene is burned, the pressure of the atmosphere in a housing 1 is controlled, and a reflector 3 is fixed at the tip of a combustion burner 2. In this case, the diamond synthesizing gas is burned so that an incomplete combustion region is present, a substrate 4 to be deposited with diamond is set in the incomplete combustion region or in the region excited into a diamond depositing function close to the incomplete combustion region.
机译:目的:为了获得稳定的宽范围燃烧火焰等离子体,并在燃烧金刚石沉积物时以高的速率高沉积平坦度和粘附强度高的金刚石膜。通过在燃烧器的尖端提供反射器。组成:当钻石沉积物补足时。例如燃烧气态乙炔,控制壳体1中的大气压力,并且将反射器3固定在燃烧器2的尖端。在这种情况下,燃烧金刚石合成气,从而燃烧区域不完全。当存在金刚石时,将要沉积金刚石的基底4设置在不完全燃烧区域中或激发到接近不完全燃烧区域的金刚石沉积功能的区域中。

著录项

  • 公开/公告号JP2833848B2

    专利类型

  • 公开/公告日1998-12-09

    原文格式PDF

  • 申请/专利权人 SHOWA DENKO KK;

    申请/专利号JP19900236196

  • 发明设计人 KOMAKI KUNIO;ARASHIDA KOJI;

    申请日1990-09-06

  • 分类号C30B29/04;

  • 国家 JP

  • 入库时间 2022-08-22 02:28:30

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