SYSTEM FOR DILUTING ULTRAPURE CHEMICALS WHICH IS INTENDED FOR THE MICROELECTRONICS INDUSTRY

摘要

The present invention relates to a system for dilutingultrapure chemicals which are intended to be used inthe microelectronics industry. For this purpose, aconcentrated chemical having a predetermined purity Pcompatible with the purity required in themicroelectronics industry is diluted with a supply ofwater of purity at least equal to P and the titre ofthe solution is adjusted by recirculating the dilutedchemical within the dilution tank, by way ofpreference, a sample of the diluted chemical then beingremoved so as to check the purity of the dilutedchemical whose titre has been verified beforehand.