OPTICAL MODULATOR INTEGRATED DEVICE WITH VERTICAL TAPER SPOT SIZE CONVERTER AND FABRICATING METHOD FOR THE SAME

摘要

The present invention relates to a method for manufacturing an optical modulator integrated device having an optical coupling efficiency having a tapered output stage using selective organometallic growth. The present invention is characterized in that the selective MOVPE crystal growth and The vertical taper optical mode converter is integrated at the site where both optical fibers of the InGaAsP light absorbing layer are combined by using an adjustable angle, and the other feature is that the optical mode converter is applied to a distributed feedback (DFB) laser integrated with an optical modulator. At the same time, since the integrated mode, the antireflective thin film manufacturing conditions are considerably alleviated compared to the case where there is no optical mode converter, thereby increasing the reliability and reproducibility of the antireflective thin film process, and thus improving the performance of the optical modulator integrated DFB laser device itself. .