Continuous production method of continuous production equipment and functionality of the deposited film of functional deposited film

摘要

PURPOSE: To make it possible to carry out mass production of solar cells with an excellent efficiency at a low cost with less damages for long size substrate by laying out introducing holes for introducing separation gas of a plurality of gas gates at irregular intervals in width direction of a strip-shaped substrate. ;CONSTITUTION: A gas gate 100 comprises an opening section adjusting member 107 with a shape of pinching a strip-shaped substrate 105 from the top and bottom and a cover 108 for the member. A slit-shaped separating path 101 is formed between the strip-shaped substrate 105 and the opening section adjusting member 107. At the portion facing the strip-shaped substrate 105 of the opening section adjusting member 107 which also corresponds to separating gas channel 103, separating gas outlets 104 for introducing a separating gas to separating path 101 are laid out at irregular intervals, that is, sparsely in the central portion and densely near the ends in the direction of width of the strip-shaped substrate 105. By doing this, gas separating capacity in the direction normal to the strip-shaped substrate carrying direction can be made uniform.;COPYRIGHT: (C)1994,JPO&Japio