METHOD AND DEVICE OF CLOSE ADHESION STRENGTHENING TREATMENT

摘要

PROBLEM TO BE SOLVED: To improve the efficiency of a close adhesion strengthening treatment.;SOLUTION: A vertically movable cup member 2 is brought down and pressed to the upper surface of a hot plate 1, and a closed space 15, where the close contact intensifying treatment is performed on the surface of a substrate W. Inside of the treatment space 15 is decompressed by opening an opening/closing valve 12, treatment vapor is introduced into the treatment space 15 by opening the opening/closing valve 36, and when the inside pressure of the treatment space 15 becomes the atmospheric pressure or thereabout, the supply of treatment vapor into the treatment space 15 is stopped. Then, the cubic capacity of the treatment space is made small by bringing down the vertically moving member 21 arranged on the treatment space 15, and a close adhesion strengthening treatment is performed in the pressure of atmosphere containing the close adhesion strengthening agent in the treatment space 15 exceeds the atmospheric air pressure.;COPYRIGHT: (C)2000,JPO