TOOL FOR PROTECTING INNER SURFACE OF QUARTZ CRUCIBLE AND PLACING OF POLYCRYSTALLINE SILICON IN QUARTZ CRUCIBLE WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a tool for protecting the inner surface of a quartz crucible, capable of reducing the damage of the inner surface of the quartz crucible to inhibit the deterioration of the quartz crucible, when polycrystalline quartz is placed in the quartz crucible.;SOLUTION: This inner surface-protecting tool comprises a cylindrical portion 11 having an outer diameter corresponding to the inner diameter of a quartz crucible, plural flaps 12 which are continuously formed on the lower edge of the cylindrical portion 11 and can close the lower opening 11a of the cylindrical portion 11 along the inner bottom surface of the quartz crucible in a bend state, and a pair of handles 13 disposed on the upper edge of the cylindrical portion 11. The method for placing polycrystalline quartz in a quartz crucible by the use of the inner surface-protecting tool comprises a process for placing the cylindrical portion of the tool along the inner peripheral surface of the quartz crucible and bending and placing the plural flap portions along the inner bottom surface of the quartz crucible, a process for placing a prescribed amount of massive or granular polycrystalline silicon in a space surrounded by the plural bent flap portions and the cylindrical portion, and a process for pulling up the cylindrical portion and extending and pulling up the plural bent flaps from the quartz crucible, while leaving the polycrystalline silicon in the quartz crucible.;COPYRIGHT: (C)2000,JPO