Volatile organic barium, strontium and calcium compounds and method for the preparation of layered materials with barium, strontium or calcium oxides or fluorides from these compounds

摘要

Volatile organic barium, strontium and calcium compounds, which consist of the complex of a barium-, strontium- or calcium- beta -diketonate and one or more coordinating ligands, characterized in that at least one coordinating ligand of the barium or strontium compound is formed by a neutral oxygen or a neutral nitrogen donor ligand, or one of the coordinating ligands of the calcium compound is formed by a neutral oxygen donor ligand, and method for the preparation of layered materials which contain one or more of the barium, strontium or calcium oxides or fluorides, by means of a deposition technique, characterized in that with the deposition technique, especially MO-CVD, one starts with the present new volatile organic barium, strontium or calcium compounds either corresponding with the respective metal oxides, or corresponding with the respective metal fluorides.