MICRO PROPELLER MANUFACTURED BY SILICON MICRO-MACHINING TECHNOLOGY

摘要

PURPOSE: A method of manufacturing a micro propeller is to provide a micro propeller to be integrated together with a fluid linear amplifier, CONSTITUTION: A method comprises steps of: patterning a silicon oxide layer on both surfaces of a silicon wafer; forming a chamber of a propeller on one surface of the silicon wafer, and forming an outlet portion of the propeller the other surface of the silicon wafer, by using a deep silicon etching process; and after removing the silicon oxide layer on both surfaces of the silicon wafer, sealing one surface of the silicon wafer to form the chamber of the propeller by using a silicon-silicone fusion engagement. By the deep silicon etching process, the chamber of the propeller is formed on a front surface of the silicon wafer, and the outlet portion of the propeller is formed on a rear surface of the silicon wafer.