Monolithic integrated filter e.g. for mobile reception technology, has input swing with conductive tongues that are connected mechanically by insulating bridge

摘要

The monolithic integrated filter comprises a silicon substrate (1), an insulating layer (2), e.g. from Si02, an input spring swing in the form of a metal surface (3) and a first metal tongue (4), an output spring transducer in the form of a second metal surface (5) and a second metal tongue (6) as well as with an insulating bridge (7) which is formed in the layout of a second insulating layer (3). The conductive tongues (4,6) are connected mechanically by an insulating bridge. Independent claims are included for methods for producing an monolithic integrated filter.