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Micro contact pin structure with a piezoelectric element and probe card using the same
Micro contact pin structure with a piezoelectric element and probe card using the same
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机译:具有压电元件的微接触针结构和使用该微接触针结构的探针卡
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摘要
A micro contact structure and a probe card to be used in testing performance of a semiconductor integrated circuit device formed on a semiconductor wafer have improved contact characteristics. The contact structure includes a micro contact pin having electric conductivity formed on one end of a beam which is movable in a vertical direction, and a piezoelectric element formed on the beam to drive the beam in the vertical direction. The beam is made of silicon on the surface of which is formed of a conductive thin film, and the micro contact pin has a pyramid shape. The piezoelectric element is a bimorph plate mounted on an upper surface of the beam or both upper and lower surfaces of the beam.
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