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Automated visual inspection apparatus for detecting defects and for measuring defect size
Automated visual inspection apparatus for detecting defects and for measuring defect size
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机译:用于检测缺陷和测量缺陷尺寸的自动化外观检查设备
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摘要
Apparatus for detecting etch defects in an object having a plurality of openings by generating an image signal of the object representing light intensity values of a plurality of pixels, processing the image signal to form data signals representing light intensity values of groups of pixels, filtering the data signals to remove signals representing the ends of the openings, and pairing two data signals when the groups of pixels represented thereby represent an etch defect.
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